Utilising SEM-EDS to measure the thickness and composition of thin layers and TEM lamella

AZtec LayerProbe is a software solution that utilizes sample analysis by Energy Dispersive X-ray Spectrometry (EDS) to determine both thickness and composition of thin layers, coatings, and TEM lamella. Many samples imaged and analysed in the SEM have layered structures or have had coatings applied. For example, electronic circuitry, solar cells, and even jewellery include thin layers and it is often necessary to understand what those layers are made of and how thick they are. This information can be useful for various purposes, including materials characterisation, quality control, and fault finding.

Thin films and coatings are used in many sectors and industries, including in metal production, electronics, pharmaceuticals, semiconductors, and photovoltaics. As such, LayerProbe is applicable to a wide range of applications, and because it is a SEM-based technique that utilizes the interaction volume of the SEM electron beam, it brings some considerable advantages over other techniques for determining layer thickness and composition. For example, it is non-destructive, provides a high spatial resolution, and is relatively inexpensive/flexible.

LayerProbe can also be used to measure TEM lamella thickness during preparation in the FIB-SEM, as well as GIS layers deposited in the FIB. This is an important aspect of TEM sample preparation. An example of this application will be presented, along with LayerProbe results obtained for layered samples from the fields of metallurgy and electronics.

Tools and functions have been built into LayerProbe to assist the user in setting up, measuring, and solving layered problems. In this webinar, we will explain these in detail, as well as tips for obtaining accurate results.

You will learn how:

• The science and methodology behind AZtec LayerProbe
• AZtec LayerProbe can be used to measure the thickness of TEM lamella during preparation in the FIB-SEMNMR addresses research and quality control questions on liquid electrolytes
• To achieve successful thin layer analysis and results using SEM-EDS and AZtec LayerProbe