Plasma-based Reactive Ion Etch and Atomic Layer Etch processes are critical for the fabrication of quantum devices of all kinds. Dr Russ Renzas will describe processes for established and emerging materials used to make a wide range of quantum devices including superconducting qubits, quantum photonic elements, and diamond-based quantum sensors. These devices require highly controlled, stable processes that will not damage the surface and leave no residues.
This webinar will give an introduction of:
On Demand
On Demand
Duration:1 hour 10 minutes
Language:English
Businesses:Plasma Technology
Dr Russ Renzas is the Quantum Technology Manager at Oxford Instruments, where he focuses on the use of atomic layer deposition ...
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