Part 1: Introduction to WDS and EDS Mapping with AZtecWave

Mapping elemental distribution across sample surfaces is a desirable endeavour in many application areas. For example, to determine the segregation of elements in metals, which may impact physical properties, and to investigate the zonation of elements in minerals, which can allude to processes occurring during crystallisation.

Elemental mapping can be conducted in an SEM, and typically Energy Dispersive Spectrometry (EDS / EDX) is used owing to the speed and simplicity of the technique. However, EDS has limitations and can struggle to produce accurate elemental maps when elements are present in trace concentrations or affected by X-ray peak overlaps in the EDS spectrum, or both. This is where elemental mapping using a fully focussing, Rowland circle Wavelength Dispersive Spectrometer (WDS / WDX) comes in. Due to the spectral resolution of WDS being ~10x better than EDS, WDS is able to map the true distribution of trace elements and those impacted by peak overlaps. AZtecWave brings together SEM-EDS and WDS, enabling WDS mapping to be conducted for the elements that require it, leaving EDS to fast and effectively acquire the other elements.

In this tutorial I will demonstrate how to acquire combined WDS and EDS maps with AZtecWave.

You will learn:

• When and why you might want to perform elemental mapping using WDS
• The guided, step-by-step approach for setting up and collecting WDS and EDS elemental maps with AZtecWave
• Tip and tricks on how to acquire good mapping data with AZtecWave and how to process and interpret the results