Abstracts
Chemical vapour deposition and atomic layer deposition of 2D materials for electronic applications
Dr Harm Knoops, Oxford Instruments Plasma Technology
Vapour deposition has been the go-to technique for device fabrication for graphene and other 2D materials. To successfully scale prototype applications currently under development, technologies and processes that enable large area deposition of these materials need to be developed. In this talk, I will give an overview of the lab and fab technologies and processes developed at Oxford Instruments towards the growth of graphene and other 2D materials such as MoS2 by techniques such as chemical vapour deposition (CVD) and atomic layer deposition (ALD).
Characterization of 2D Materials using Confocal Raman, PL, Second-Harmonic generation as well as Atomic Force Microscopy in ambient and cryogenic environments
Dr Thomas Dieing, WITec GmbH
Raman spectroscopy, as well as photoluminescence spectroscopy, have been used to characterize 2D materials since their discovery. Combining this with confocal microscopy enhances the knowledge gained from those materials by high-resolution imaging capabilities. This allows the determination and location of variations in composition as well as doping or strain states.
In addition, complementary techniques such as second-harmonic generation microscopy or atomic force microscopy can further enhance the knowledge gained from such samples. Finally, the evaluation of the sample features under cryogenic temperatures and/or high magnetic fields can additionally assist the deeper understanding of the samples. In this talk, examples will be shown for all the above-mentioned techniques taken on Graphene and other 2D materials.
Device Fabrication Processes and Examples of Electronic Devices based on 2D Materials
Dr Gordon Rinke, AMO GmbH
After being introduced to different growth and characterization techniques, I would like to sketch the process for the fabrication of devices based on 2D Materials, in particular, graphene as the most prominent representative of this group. Therefore, a short overview of transfer, structuring and contacting the materials are given which are the important steps to build the devices. Finally, different examples of devices fabricated at AMO are presented.