QUANTUM TECHNOLOGY

Fabrication Processes for High Quality Quantum Devices

Quantum devices are extraordinarily sensitive to the loss of their quantum properties. Improved device fabrication processes can mitigate these losses. Working closely with the quantum community, Oxford Instruments Plasma Technology offers solutions to minimize losses arising from device processing.

In this webinar, we will review the uses of the technologies below for creating better superconducting, colour centre (diamond/SiC), and photonic quantum devices:

Atomic Layer Deposition (ALD) of superconducting materials for Qubits such as NbN and TiN
Deep Reactive Ion Etching of Silicon (DSiE) for TSV to enable 3D integration of Quantum circuits
Reactive Ion Etching (RIE) for smooth diamond thinning for NV centres

Watch on demand