The AVS 25th International Conference on Atomic Layer Deposition (ALD 2025) featuring the 12th International Atomic Layer Etching Workshop (ALE 2025) will open its doors from 22nd to 25th June 2025. This event will focus on the science and technology of atomic layer controlled deposition of thin films and atomic layer etching.
Oxford Instruments Plasma Technology team is looking forward to welcoming you to the event, to discuss your current projects and workflows. If you would like to book a meeting with us during the event, please complete the form below.
We are honoured to announce that our expert Dr Harm C.M. Knoops, will be one of the ALE invited speakers at the conference. He will also be one of the moderators for the Atomic Layer Etching Applications sessions.
Additionally, during the conference, Dr Adriaan J.M. Mackus, Eindhoven University of Technology (TU/e) will deliver a talk based on the abstract of our Dr Nick Chittock, on the subject below.
For further information, visit the AVS ALD/ALE 2025 website and visit AVS ALD/ALE Program 2025.
Location
Jeju Island / South Korea
Date
22-25 June 2025
Booth
20
Business
Plasma Technology
Dr Harm C.M. Knoops
Date: Tuesday, 24 June, 1:30 - 2:00 pm (KST), Room Samda Hall
Title: Isotropic and Anisotropic ALE: Tool Aspects‚ Processes‚ and Applications
Moderator of Atomic Layer Etching Session (ALE2-TuA)
ALE Applications II
Date: Tuesday, 24 June, 4 - 5:30 pm (KST), Room Samda Hall
Dr Nick Chittock*
Date: Monday, 23 June, 4:45 - 5:00 pm (KST), Room Samda Hall
Title: Investigation of Plasma ALD and ALE of Al2O3 in Nanoscale Structures: Towards Corner Lithography at the sub-20 nm Scale
*talk will be delivered by Dr Adriaan J.M. Mackus, Eindhoven University of Technology (TU/e)
Dr Arpita Saha
Date: Tuesday, 24 June, 5:45 - 7:00 pm (KST), Room Event Hall
Title: Fast‚ Remote Plasma ALD of Highly Conductive TiN for Quantum Applications
Dr Yi Shu
Date: Monday, 23 June, 5:45 - 7:00 pm (KST), Room Event Hall
Title: Fast Deposition of High-Quality ALD Materials Using the PlasmaPro ASP System
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