Oxford Instruments specialises in the design, manufacture and support of innovative solutions, tools and systems for the emerging nanotechnology markets in areas such as XRF (X-ray Fluorescence) analysers , microanalysis systems, superconducting wires, NMR (nuclear magnetic resonance) magnets, cryogenic systems, plasma etch and deposition low temperature environments and coating thickness measurement.

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INCAViewer & INCABatch

Download INCAViewer

INCAViewer : to view and manipulate INCA data.
INCABatch : export multiple spectra and images to be used for further analysis of data. Download »

Training Courses

EDS, WDS and EBSD Training Courses

Details of our training courses for:
INCAEnergy
INCAWave
INCAFeature/INCAGSR
HKL Channel
Quantitative Analysis
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Nanotech Capability

INCA leads the way in NanoAnalysis

Oxford Instruments NanoAnalysis’ INCA system is the world’s leading platform for X-ray analysis on the SEM and TEM. Software and detector technology for Energy Dispersive Microanalysis (EDS), as well as Wavelength Dispersive Microanalysis (WDS) and Electron Backscatter Diffraction (EBSD) are all seamlessly integrated into this single universal platform.

  • INCAEnergy TEM - elemental determination at the nm scale for thinned samples.
  • INCAEnergy SEM - and INCAWave - elemental determination at sub 100 nm spatial resolution for bulk samples, and quantitative composition and thickness measurements for thin films at the nm scale (SEM).

These techniques are extensively used for the characterisation of a wide variety of nano-applications including novel nano-catalysts, high temperature superconductors, optoelectronic devices and advanced nano-composites for aerospace.

  • INCACrystal and HKL Channel 5 - determination of the crystal phase, texture and grain orientation at features for features down to approximately 10 nm (SEM).  This technique is utilised, for example, in the characterisation of semiconductor interconnects, high performance ceramics and advanced alloys.
  • INCA Feature - automated location and characterisation of morphology and composition of nanoscale features (SEM). This technique is utilised, for example, in the classification and characterisation of high performance ceramics, advanced alloys and nano materials.

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